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TESCOM 64-2600 Series 高純減壓閥

High Purity Controls Division
	1/4" Point of Use Pressure Regulators
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Regulator	Description	Product Info.	Source Pressure	Delivery Pressure	Certified Inboard Leak Rate	Flow Range	Body Material
FOCUS F1 Electronic Pressure Controller	?Closed loop pressure control ?4-20mA, 1-5V, 0-10V ?C_v = .15 ?5 R_a or 10 R_a microinch finishes	Catalog (TBD) CAD	600 PSIG	90 PSIG	1X10^-9	0-100 SLPM	316L SST or 316L SST VAR
64-2600 Series	?Single Stage ?Ultra-High Purity ?5 Ra or 10 Ra microinch finishes ?Electropolish or internal electropolish ?Free poppet design ?Hastelloy® trim available ?Cv=.06 (3500 PSIG max. inlet) ?Cv=.15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100, 250 PSIG	1X10^-9	0-100 SLPM	316L SS or 316L SS VAR
64-2800 Series	?Single Stage ?Ultra-High Purity ?Tied diaphragm design ?Electropolish or internal electropolish ?5 Ra or 10 Ra microinch finishes ?Hastelloy® trim available ?Cv=.06 (3500 PSIG max. inlet) ?Cv=.15 (1000 PSIG max. inlet)	Catalog CAD	1000, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-100 SLPM	316L SS or 316L SS VAR
64-3600 Series	?Single Stage ?Ultra-High Purity ?Low Droop ?High sensitivity ?10 Ra microinch finishes ?Electropolish or internal electropolish ?Free poppet or tied diaphragm ?Hastelloy® trim available ?Cv=.06 (3500 PSIG max. inlet) ?Cv=.15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-100 SLPM	316L SS
64-5000 Series	?Single Stage ?Ultra-High Purity ?Absolute Pressure ?Sub-atmospheric pressure control ?5 Ra or 10 Ra microinch finishes ?Cv=.06 (3500 PSIG max. inlet) ?Cv=.15 (600 PSIG max. inlet) ?Cv=.24 (120 PSIG max. inlet)	Catalog CAD	120, 600, 3500 PSIG	28"Hg to: 15, 30, 60, or 100 PSIG	1X10^-9	0-5 SLPM	316L SS or 316L SS VAR
74-2400 Series	?Single Stage ?Ultra-High Purity ?Tied diaphragm design ?Internally springless & threadless ?Electropolish or Precision Electro-Polish ?5 Ra or 10 Ra microinch finishes ?Cv=.15	Catalog CAD	600 PSIG	30, 60, 100 PSIG	1X10^-9	0-100 SLPM	316L SS VAR
MR-2400 Series	?Single Stage ?Ultra-High Purity ?Tied diaphragm design ?Internally springless & threadless ?5 Ra microinch finishes ?Electropolish or Precision Electro-Polish ?Cv=.06 (3500 PSIG max. inlet) ?Cv=.15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100 PSIG	4X10^-11	0-100 SLPM	316L SS VAR
12 Series	?Single Stage ?Ultra-High Purity ?Miniature ?Tied diaphragm design ?Internally springless & threadless ?5 Ra or 10 Ra microinch finishes ?Electropolish or Precision Electro-Polish ?1.5" or 1.125" base	Catalog CAD	150 PSIG	28"Hg to: 15, 30, 60, or 100 PSIG	1X10^-9	0-20, 0-50 SLPM	316L SS VAR